TY  - BOOK
AU  - Barnat,Edward V.
ED  - Toh Ming Lu
TI  - Pulsed and Pulsed Bias Sputtering : Principles and Applications
SN  - 140207543X
U1  - 521.2 
PY  - 2003///
CY  - Boston 
PB  - Kluwer Academic
KW  - Mathematics
N1  - Includes bibliographical references and index
ER  -