TY - BOOK AU - Ghandhi,Sorab Khushro TI - VLSI fabrication principles: silicon and gallium arsenide SN - 9788126517909 AV - TK7874 .G473 1983 U1 - 004.00 19 PY - 1983/// CY - New York PB - Wiley KW - Integrated circuits KW - Very large scale integration KW - Silicon KW - Gallium arsenide N1 - "A Wiley-Interscience publication."; Includes bibliographical references and index ER -