000 00414nam a2200157Ia 4500
008 180531s9999||||xx |||||||||||||| ||und||
020 _a8181282027
040 _cPK-GjGUL
082 _a620.5
_bFUJ-M
100 _a"Fujita, H."
245 _aMicromachines as tools for nanotechnology
_c"Fujita, H."
260 _aNew Delhi
_bSpringer
_c2003
300 _a211 p.
650 _aElectrical Engineering
942 _cBK
999 _c15070
_d15070