000			00575cam a22002054a 4500
001			13232700
008			030610s2003 maua b 001 0 eng
020			_a140207543X
040			_cPKGjGUL
082	0	0	_a521.2 _bBAR-P
100	1		_aBarnat, Edward V.
245	1	0	_aPulsed and Pulsed Bias Sputtering : Principles and Applications
260			_aBoston _bKluwer Academic _c2003
300			_ax, 155p. _bill. ; _cS, HBK
500			_aIncludes bibliographical references and index.
546			_aEng.
650			_aMathematics
710			_aToh Ming Lu
942			_2ddc _cBK
999			_c27138 _d27138