| 000 | 00408nam a2200157Ia 4500 | ||
|---|---|---|---|
| 008 | 160902s9999 xx 000 0 und d | ||
| 020 | _a0-07-048709-X | ||
| 040 | _cPK-GjGUL | ||
| 082 |
_a621.381 _bHSU-M |
||
| 100 | _a"Hsu, Tai-Ran" | ||
| 245 | 0 | _aMEMS and microsystems design and manufacture | |
| 260 |
_aIndia _bTata McGraw Hill Publishing Company _c2002 |
||
| 300 | _a436 | ||
| 546 | _aeng | ||
| 942 | _cBK | ||
| 999 |
_c7386 _d7386 |
||