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Pulsed and Pulsed Bias Sputtering : Principles and Applications

Barnat, Edward V.

Pulsed and Pulsed Bias Sputtering : Principles and Applications - Boston Kluwer Academic 2003 - x, 155p. ill. ; S, HBK

Includes bibliographical references and index.

Eng.

ISBN: 140207543X

Subjects--Topical Terms:
Mathematics

Dewey Class. No.: 521.2 / BAR-P

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