VLSI fabrication principles : silicon and gallium arsenide /

Ghandhi, Sorab Khushro, 1928-

VLSI fabrication principles : silicon and gallium arsenide / Sorab K. Ghandhi. - New York : Wiley, c1983. - xi, 665 p. : ill. ; 24 cm.

"A Wiley-Interscience publication."

Includes bibliographical references and index.

9788126517909

82010842


Integrated circuits--Very large scale integration.
Silicon.
Gallium arsenide.

TK7874 / .G473 1983

004.00 / KGH-V

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